| 项目 | 3N | 3N5 | 4N | 4N5 | 5N | 5N5 | 单位 | 检测方法 | 
| 总纯度 | ≥99.9 | ≥99.95 | ≥99.99 | ≥99.995 | ≥99.999 | ≥99.9995 | % [wt] | 
 | 
| Ag | - | - | 1 | 0.5 | 0.01 | 0.01 | ppm [wt] | GDMS | 
| Al | - | 50 | 10 | 3 | 2 | 2 | ppm [wt] | GDMS | 
| As | - | - | 10 | 1 | 0.5 | 0.5 | ppm [wt] | GDMS | 
| Au | - | - | 1 | 0.5 | 0.25 | 0.25 | ppm [wt] | GDMS | 
| B | - | 1 | - | 0.1 | 0.05 | 0.05 | ppm [wt] | GDMS | 
| Be | - | - | - | 0.5 | 0.5 | 0.5 | ppm [wt] | GDMS | 
| Bi | - | - | - | 0.1 | 0.05 | 0.05 | ppm [wt] | GDMS | 
| Ca | - | - | 1 | 1 | 0.5 | 0.5 | ppm [wt] | GDMS | 
| Cd | - | - | - | 1 | 0.2 | 0.2 | ppm [wt] | GDMS | 
| Cl | 600 | 10 | 5 | 1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Co | - | - | 5 | 1 | 0.05 | 0.05 | ppm [wt] | GDMS | 
| Cr | - | 20 | 5 | 1 | 0.8 | 0.8 | ppm [wt] | GDMS | 
| Cu | - | 50 | 5 | 2 | 1 | 1 | ppm [wt] | GDMS | 
| F | - | - | - | 15 | 0.5 | 0.5 | ppm [wt] | GDMS | 
| Fe | 700 | 200 | 10 | 7 | 5 | 3 | ppm [wt] | GDMS | 
| Hg | - | - | - | 0.5 | 0.5 | 0.1 | ppm [wt] | GDMS | 
| K | - | 0.1 | 0.1 | 0.05 | 0.05 | 0.01 | ppm [wt] | GDMS | 
| Li | - | 0.1 | 0.1 | 0.05 | 0.05 | 0.005 | ppm [wt] | GDMS | 
| Mg | - | 1 | 2 | 1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Mn | - | 10 | 5 | 1 | 1 | 0.5 | ppm [wt] | GDMS | 
| Mo | - | - | 4 | 1 | 0.05 | 0.05 | ppm [wt] | GDMS | 
| Na | - | - | 0.2 | 0.03 | 0.03 | 0.03 | ppm [wt] | GDMS | 
| Ni | 250 | 25 | 5 | 1 | 0.5 | 0.5 | ppm [wt] | GDMS | 
| P | - | - | - | 1 | 0.25 | 0.01 | ppm [wt] | GDMS | 
| Pb | - | - | - | 1 | 0.1 | 0.01 | ppm [wt] | GDMS | 
| Pd | - | - | - | 0.1 | 0.1 | 0.01 | ppm [wt] | GDMS | 
| S | - | - | 10 | 10 | 5 | 3 | ppm [wt] | GDMS | 
| Sb | - | - | 7 | 0.5 | 0.5 | 0.05 | ppm [wt] | GDMS | 
| Si | 200 | 50 | 5 | 2 | 1 | 1 | ppm [wt] | GDMS | 
| Sn | - | - | 5 | 1 | 0.5 | 0.01 | ppm [wt] | GDMS | 
| Te | - | - | - | 0.5 | 0.5 | 0.05 | ppm [wt] | GDMS | 
| Th | - | 0.001 | 0.001 | 0.0005 | 0.0001 | 0.0001 | ppm [wt] | GDMS | 
| U | - | 0.001 | 0.001 | 0.0005 | 0.0001 | 0.0001 | ppm [wt] | GDMS | 
| V | - | - | - | 1 | 1 | 1 | ppm [wt] | GDMS | 
| W | - | - | - | 1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Zn | - | - | 5 | 1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Zr | - | - | 5 | 3 | 1 | 1 | ppm [wt] | GDMS | 
| Ba | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Br | - | - | - | 0.5 | 0.5 | 0.5 | ppm [wt] | GDMS | 
| Ce | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Cs | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Ga | - | - | - | 0.5 | 0.5 | 0.5 | ppm [wt] | GDMS | 
| Ge | - | - | - | 0.5 | 0.5 | 0.5 | ppm [wt] | GDMS | 
| Hf | - | - | - | 1 | 1 | 1 | ppm [wt] | GDMS | 
| I | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| In | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| La | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Pt | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Re | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Rh | - | - | - | 0.2 | 0.2 | 0.2 | ppm [wt] | GDMS | 
| Ru | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Sc | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Se | - | - | - | 0.5 | 0.5 | 0.5 | ppm [wt] | GDMS | 
| Pr | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Nd | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Sm | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Eu | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Gd | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Tb | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Dy | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Ho | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Er | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Tm | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Yb | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Lu | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Os | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Ir | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Pt | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| Tl | - | - | - | 0.1 | 0.1 | 0.1 | ppm [wt] | GDMS | 
| C | 200 | 150 | 50 | 30 | 30 | 30 | ppm [wt] | LECO | 
| H | 50 | 10 | 5 | 10 | 6 | 6 | ppm [wt] | LECO | 
| N | 200 | 100 | 50 | 30 | 30 | 30 | ppm [wt] | LECO | 
| O | 800 | 700 | 450 | 300 | 200 | 100 | ppm [wt] | LECO | 
高纯度钛,高纯钛材料。